AN INTEGRATED MICRO DEVICE, A METHOD FOR DETECTING BIOMARKERS USING THE INTEGRATED MICRO DEVICE, A METHOD FOR MANUFACTURING AN INTEGRATED MICRO DEVICE, AND AN INTEGRATED MICRO DEVICE ARRANGEMENT

摘要

AN INTEGRATED MICRO DEVICE, A METHOD FOR DETECTING BIOMARKERS USING THE INTEGRATED MICRO DEVICE, A METHOD FOR MANUFACTURING AN INTEGRATED MICRO DEVICE, AND AN INTEGRATED MICRO DEVICE ARRANGEMENTAbstractEmbodiments provide an integrated micro device. The integrated micro device comprises a substrate, a first microfluidic device disposed over a first surface of the substrate, a second microfluidic device disposed over a second surface of the substrate, and at least one via hole through the substrate connecting the first microfluidic device and the second microfluidic device. The second surface of the substrate is opposite to the first surface of the substrate. The first microfluidic device is monolithically integrated with the substrate, and the second microfluidic device is monolithically integrated with the substrate.FIG. 1