SU-8 microneedles for monitoring and neural stimulation.

摘要

The invention relates to an SU-8 microneedle for monitoring and stimulating neurons, having a thickness less than 100 micrometers and a length of 50 micrometers to 10 centimeters, the manufacturing method of which allows removing the microneedle from the substrate without using mechanical means due to the initial coating of a rigid substrate with an aluminium layer as a sacrificial layer and the final chemical etching of the aluminium layer for chemically removing the microneedle obtained in known intermediate photolithographic manufacturing steps.