首页> 外文期刊>Journal of Micromechanics and Microengineering >Development of SU-8 hollow microneedles on a silicon substrate with microfluidic interconnects for transdermal drug delivery
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Development of SU-8 hollow microneedles on a silicon substrate with microfluidic interconnects for transdermal drug delivery

机译:用微流体互连的硅衬底上的SU-8空心微针的研制进行透皮药物递送

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摘要

Hollow microneedle (MN) arrays offer versatility and control to transdermal drug delivery systems where a variety of drugs and their continuous supply are concerned. They may be used as a standalone device or be integrated with the drug reservoir or micropump. An important aspect in this regard is the effective fluidic communication between the reservoir and the MNs on a robust substrate. In a novel attempt of its kind, we present the development hollow SU-8 MNs on a pre-etched silicon wafer having through holes. SU-8 MNs are fabricated by direct laser writing by aligning them on the silicon substrate with microfluidic ports pre-etched by wet chemical etching. Each process step was optimized after a parametric study. The optimized MNs (500-600 mu m length, 100 mu m outer diameter and 40 mu m inner diameter) have an aspect ratio of 5. The MNs have been characterized for mechanical strength and biological insertion tests for their effectiveness in puncturing the skin without breaking. The maximum compressive force and bending forces for the MNs are 0.27 N and 0.022 N per needle, which are higher than the resistive skin penetrating forces. The microfluidic characterizations show the development of hollow MN lumen with a flowrate of around 0.93 mu l s(-1) at 2 KPa pressure difference at the inlet. The array of 10 x 10 MNs with 500 mu m spacing was able to successfully penetrate mice and rat skin without any breakage.
机译:空心微针(MN)阵列为透皮药物递送系统提供多功能性和对照,其中涉及各种药物及其连续供应。它们可以用作独立设备或与药物储存器或微泵集成。这方面的一个重要方面是储存器和鲁棒基板上的储存器和MN之间的有效流体连通。在这种新的尝试中,我们在具有通孔的预蚀刻硅晶片上呈现开发空心SU-8 MN。通过通过湿化学蚀刻预先蚀刻的微流体端口将它们与硅衬底对准,通过直接激光书写来制造SU-8 MN。在参数研究之后优化每个过程步骤。优化的MNS(500-600μm长,100μm外径和40μm内径)具有5.纵横比为5. MNS已经表征了机械强度和生物插入试验,以便其在没有刺穿皮肤的情况下的有效性打破。 MNS的最大压缩力和弯曲力为每针0.27 n和0.022n,其高于电阻性皮肤穿透力。微流体表征显示出在入口处在2kPa压力差的流动率约为0.93μl(-1)的流量的中空Mn内腔的开发。 10×10 Mns的阵列具有500μm间距的阵列能够在没有任何破损的情况下成功穿透小鼠和大鼠皮肤。

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