THICKNESS VARIATION MEASURING DEVICE, SYSTEM USING SAME, SURFACE MICROSCOPE USING SAME, THICKNESS VARIATION MEASURING METHOD, AND SURFACE IMAGE ACQUIRING METHOD USING SAME

摘要

The present invention provides a thickness variation measuring device which can measure minute thickness variations in a precise and accurate manner through an inexpensive and simple configuration, as well as a system using same, a surface microscope using same, a thickness variation measuring method, and a surface image acquiring method using same. For this purpose, the thickness variation measuring device comprises: a light source which irradiates a light beam onto an object to be measured; a curved reflector which reflects the light beam reflected by the object to be measured; and a sensing unit, which senses the light beam reflected by the curved reflector.