THICKNESS VARIATION MEASURING DEVICE, SYSTEM USING SAME, SURFACE MICROSCOPE USING SAME, THICKNESS VARIATION MEASURING METHOD, AND SURFACE IMAGE ACQUIRING METHOD USING SAME

摘要

Provided are an apparatus for measuring a thickness change, a system using the apparatus, a morphology microscope using the apparatus, a method of measuring a thickness change, and a method of acquiring a morphology image by using the measuring method, by which a minute thickness change may be precisely and accurately measured or a morphology image may be acquired by using an inexpensive and simple configuration. The apparatus includes a light source for irradiating beam onto a target object; a curved reflector for reflecting the beam reflected on the target object and incident onto the curved reflector; and a sensing unit for sensing the beam reflected on the curved reflector.