QUANTITATIVE TEMPERATURE AND THERMAL CONDUCTIVITY MEASURING METHOD USING SCANNING THERMAL MICROSCOPE

摘要

PURPOSE: A quantitative temperature and a thermal conductivity measuring method is provided to measure a quantitative temperature by eliminating an effect by air using SThM(Scanning Thermal Microscope) method. CONSTITUTION: A probe of the SThM measures contact mode temperature by injecting a test sample while the probe is being contacted with the test sample. The probe of SThM measures lift mode temperature by injecting the test sample according to the gap from the test sample. An interpolation temperature from the gap is 0 is calculated by extrapolation method using the lift mode temperature. A quantitative temperature and a thermal conductivity are obtained by compared with the contact mode temperature, and interpolation temperature.