Measuring thermal conductivity of nanocrystalline diamond film with a scanning thermal microscope

摘要

This study has demonstrated that the thermal conductivity of small samples of highly thermally conductive materials can be accurately measured using scanning thermal microscopy (SThM) when calibrated using Johnson noise thermometry. A nanocrystalline diamond film sample was measured in two forms, membrane and film supported on a Si substrate. The results indicate that the membrane sample is necessary for accurate thermal measurement.