METHOD FOR MEASURING QUANTITATIVE TEMPERATURE AND THERMAL CONDUCTIVITY USING A SCANNING THERMAL MICROSCOPE

摘要

The present invention relates to a scanning thermal microscope which scans a specimen at a nanoscale resolution to display thermal characteristics or the like of the specimen in images, and to a method for measuring quantitative temperature and thermal conductivity using the scanning thermal microscope. Particularly, the present invention proposes a scanning thermal microscope and a method for measuring quantitative temperature and thermal conductivity using the scanning thermal microscope, wherein the method comprises: a step of scanning a specimen while a probe of the scanning thermal microscope contacts the specimen, to measure the temperature (that is, a contact mode temperature) of the specimen; a step of scanning the specimen multiple times in accordance with the height of the probe of the scanning thermal microscope from the specimen, to measure the temperature (that is, a contactless mode temperature) of the specimen; a step of calculating an interpolating temperature, in which the height of the probe from the specimen is zero, by an extrapolation from the contactless mode temperature obtained by the multiple scanning operations; and a step of acquiring a local quantitative temperature and thermal conductivity by comparing the contact mode temperature with the interpolating temperature.