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METHOD FOR FORMING FINE CIRCUIT STRUCTURE USING CONTROLLING RESIDUAL STRESS AND METHOD FOR FORMING PRINTED CIRCUIT BOARD USING THEREOF
METHOD FOR FORMING FINE CIRCUIT STRUCTURE USING CONTROLLING RESIDUAL STRESS AND METHOD FOR FORMING PRINTED CIRCUIT BOARD USING THEREOF
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机译:利用控制残余应力形成精细电路结构的方法和利用其形成印刷电路板的方法
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摘要
PURPOSE: A method for forming a micro circuit pattern through a residual stress control and a printed circuit board using the same are provided to improve yield and obtain high density by implementing a high etching factor. CONSTITUTION: A first copper foil layer is formed on the upper side of an insulation substrate. The residual stress of a copper layer is offset by applying a tensile force to a copper foil layer before the copper foil layer is etched(S300). A circuit pattern is formed by etching the first copper foil layer and a via hole is formed on the insulation layer by a drill process(S220). A second copper foil layer is formed on the surface of the first copper layer and the inner surface of the via hole by a plating process(S230). The residual stress of the second copper foil layer is offset by applying the tensile force to the second copper foil layer. A micro circuit pattern is formed by etching the first and second copper foil layers.
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