AUTO-SEQUENCING MULTI-DIRECTIONAL INLINE PROCESSING APPARATUS, CAPABLE OF PROCESSING A PLURALITY OF SUBSTRATES WITH HIGH ACCURACY AND HIGH THROUGHOUT

摘要

PURPOSE: An auto-sequencing multi-directional inline processing apparatus is provided to the flexibility of a main frame architecture while having the throughput of a linear system. ;CONSTITUTION: In an auto-sequencing multi-directional inline processing apparatus, a first loadlock chamber(110) is connected to the first side of a vacuum chamber(100). A vacuum valve(112) is arranged in the entrance of the loadlock chamber A second load lock chamber(115) is connected to the second side of the vacuum chamber. A loading chamber(112) is arranged in the entrance of the loadlock chamber A controller(140) opens the valve(102) to exchange the substrate.;COPYRIGHT KIPO 2011