METHOD FOR MANUFACTURING GRAPHENE USING A GERMANIUM LAYER CAPABLE OF PREVENTING THE GENERATION OF METAL IMPURITIES BY OMITTING A METAL CATALYST

摘要

PURPOSE: A method for manufacturing graphene using a germanium layer is provided to obtain pure graphene directly on a germanium layer or a germanium substrate without a metal catalyst.;CONSTITUTION: A method for manufacturing graphene(130) using a germanium layer(120) includes the following: The germanium layer is formed on a substrate(110). The graphene is directly formed on the germanium layer by supplying carbon containing gas into a chamber in which the substrate is arranged. The substrate is composed of one selected from a group including silicon, silicon oxide, quartz, glass, plastic, sapphire. The graphene is composed of one to three layers by a chemical vapor deposition method. The thickness of the germanium layer is between 100nm and 10um.;COPYRIGHT KIPO 2012