Optical inspection of wafers using a PC scanner

• 1. 检查缺陷的方法、进行缺陷检查后的晶圆或者使用该晶圆制造的半导体元件、晶圆或者半导体元件的质量管理方法以及缺陷检查装置 [P] . 中国专利： CN102648405A . 2012-08-22
• 2. 晶圆检查装置和使用晶圆检查装置制造半导体装置的方法 [P] . 中国专利： CN113314431A . 2021-08-27
• 3. METHOD OF PERFORMING DIAGNOSTIC TEST IN A SCANNER OF A PRECINCT COUNT OPTICAL SCANNER (PCOS) MACHINE USING A BALLOT WITHOUT UV MARKS [P] . PH22015000272Y1 . 2015-09-28

  机译： 使用无UV标记的精密计数光学扫描仪（PCOS）的扫描仪中的诊断测试方法

• 4. METHOD OF PERFORMING DIAGNOSTIC TEST IN A SCANNER OF A PRECINCT COUNT OPTICAL SCANNER (PCOS) MACHINE USING A BALLOT WITH UV MARKS [P] . PH22015000271Y1 . 2015-09-28

  机译： 使用带有UV标记的投票在精密计数光学扫描仪（PCOS）的扫描仪中执行诊断测试的方法

• 5. METHOD OF PERFORMING DIAGNOSTIC TEST IN A SCANNER OF A PRECINCT COUNT OPTICAL SCANNER (PCOS) MACHINE USING A BALLOT WITHOUT UV MARKS [P] . PH22015000272U1 . 2015-09-28

  机译： 使用无UV标记的精密计数光学扫描仪（PCOS）的扫描仪中的诊断测试方法

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• 7. Iterative Methods for High Precision Motion Control with Application to a Wafer Scanner System. [D] . Stearns, Hoday Margaret. 2011
• 8. An Improved Low-Noise Processing Methodology Combined with PCL for Industry Inspection Based on Laser Line Scanner [O] . Jianxiong Li, Qian Zhou, Xinghui Li, 2019
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• 1. Optical absorption and photoelectron collection properties of silicon wafers with conical quantum nanocrystals structure [J] . Yuriy Vashpanov ,Jae-Il Jeong . 安徽地质 . 2010,第003期
• 2. Hamamatsu’s Products for Optical Inspection,Metrology and Monitoring to Improve Yield and Accuracy for Semiconductor Processes [J] . Chenghao Xiang1 ,Xusheng Zhou1 . 微电子制造学报 . 2019,第001期
• 3. Transmission Characteristics of Tuneable Optical Filters Using Optical Ring Resonator with PCF Resonance Loop [J] . Kazhal Shalmashi ,Faramarz E. Seraji ,Mansur Rezaei Mersagh . 光学与光子学期刊（英文） . 2011,第4期
• 4. 使用太赫兹射线计算机辅助层析成像进行儿童医疗检查 [C] . 李喜来 ,徐军 ,曹付允 . 第六届全国毫米波亚毫米波学术会议 . 2006
• 5. PCB光学特性对PCB光电外观检查机性能的影响机理 [A] . 谢煜 . 2014