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CLEANING METHOD OF THIN FILM FORMATION APPARATUS, THIN FILM FORMATION METHOD, AND THIN FILM FORMATION APPARATUS
CLEANING METHOD OF THIN FILM FORMATION APPARATUS, THIN FILM FORMATION METHOD, AND THIN FILM FORMATION APPARATUS
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机译:薄膜形成装置的清洁方法,薄膜形成方法和薄膜形成装置
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摘要
PROBLEM TO BE SOLVED: To provide a cleaning method and the like of a thin film formation apparatus which improves the etching rate for extraneous matter adhered to the interior of the apparatus and the selection ratio thereby reducing a burden to a gas supply device.;SOLUTION: A control part 100 controls a heater for heat-up 16 to heat the interior of a reaction tube 2 to a predetermined temperature and supplies a cleaning gas containing a fluorine gas and a silane gas from a processing gas introduction tube 17 to the reaction tube 2 with the reaction tube 2 heated to the predetermined temperature. The supplied cleaning gas is activated in the reaction tube 2 and removes extraneous matter adhered to the interior of a thin film formation apparatus 1 thereby cleaning the interior of the thin film formation apparatus 1.;COPYRIGHT: (C)2013,JPO&INPIT
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