ELASTIC SURFACE WAVE SENSOR, SENSING SYSTEM AND PRESSURE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an elastic surface wave sensor, a sensing system and a pressure measuring method that can accurately detect the state of a measuring object, even when a temperature changes.;SOLUTION: A difference between output voltages of a first elastic surface wave element and a second elastic surface wave element is taken to obtain a first arithmetic value (including influence of pressure and temperature). A difference between output voltages of a third elastic surface wave element and the second elastic surface wave element is taken to obtain a second arithmetic value (including only influence of temperature). By using a map of the second arithmetic value and a substrate change amount by the temperature, the second arithmetic value is converted into the substrate change amount by (only) the temperature, a temperature correction amount (corresponding to a pressure reference value) is obtained from the substrate change amount by the temperature, an added value that the first arithmetic value is added to the temperature correction amount is obtained, and the substrate change amount by the pressure and temperature is obtained from the added value. By deducting the substrate change amount by only the temperature from the substrate change amount by the pressure and temperature, the substrate change amount by only the pressure is obtained.;COPYRIGHT: (C)2012,JPO&INPIT