OPTICAL METHOD AND SENSOR FOR DETECTING PRESSURE AND WAVE PLATE FOR SENSOR, POLARIZED LIGHT SELECTOR AND BEAM DISTRIBUTOR, AND MULTIPOINT MEASURING OPTICAL PRESSURE SENSOR SYSTEM AND ITS SENSING PROBE

摘要

PURPOSE: To provide an optical pressure sensor which is usable without any special explosion-proof construction, highly reliable optical pressure detecting method and pressure sensor which can be manufactured easily, and multipoint measuring optical pressure sensor system. ;CONSTITUTION: The light from a light source 1 is distributed by means of a light distributor 6 and the light made incident to a sensing probe 20 through a polarization plane maintaining fiber 16 is split into a reference beam and measurement beam. The reference beam passes through an airtight container 26 constituting a reference medium and the measurement beam is led to a light receiving section 34 through the fiber 16 and distributor 6 after passing through a gas which is a pressure sensitive medium and detected. A signal processing section 42 finds the difference between the optical path lengths of the two beams after the beams respectively pass through the reference medium and pressure sensitive medium and detects the pressure of the pressure sensitive medium from the difference between the optical path lengths.;COPYRIGHT: (C)1996,JPO