FLASH LIGHT DISCHARGE LAMP LIGHTING DEVICE, LIGHT IRRADIATOR, AND CURING METHOD OF PHOTO-CURING MATERIAL

摘要

PROBLEM TO BE SOLVED: To enhance the yield in semiconductor chip production by suppressing generation of distortion on a wafer in the light irradiation process of a semiconductor wafer.;SOLUTION: The flash light discharge lamp lighting device comprises a plurality of boosting and charging circuits which charges a plurality of storage elements with the boosted input voltage, a plurality of starting circuits which starts lighting of a plurality of flash light discharge lamps connected with the plurality of storage elements and having different irradiation ranges, a plurality of power supply control circuits which control the plurality of charging circuits and starting circuits, and a lighting device control unit which controls the plurality of power supply control circuits integrally. The lighting device control unit is configured to control the power supply control circuits to light the plurality of flash light discharge lamps at individual timings.;COPYRIGHT: (C)2012,JPO&INPIT