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FLASH LIGHT DISCHARGE LAMP LIGHTING DEVICE, LIGHT IRRADIATOR, AND METHOD OF HARDENING PHOTO-CURING MATERIAL BY USING FLASH LIGHT DISCHARGE LAMP LIGHTING DEVICE
FLASH LIGHT DISCHARGE LAMP LIGHTING DEVICE, LIGHT IRRADIATOR, AND METHOD OF HARDENING PHOTO-CURING MATERIAL BY USING FLASH LIGHT DISCHARGE LAMP LIGHTING DEVICE
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机译:闪光灯放电灯照明设备,光辐射器以及通过使用闪光灯放电灯照明设备来硬化光固化材料的方法
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摘要
PROBLEM TO BE SOLVED: To suppress generation of distortion on a wafer at a light irradiation step of a semiconductor wafer and the like, and thereby to improve a yield in semiconductor chip manufacturing.;SOLUTION: A flash light discharge lamp lighting device lights a flash light discharge lamp to harden a photo-curing material added to a substrate. The flash light discharge lamp lighting device has: a step-up charging circuit comprising a step-up circuit stepping up an input voltage and a power storage circuit charging an output of the step-up circuit; an initiation circuit performing dielectric breakdown of the flash light discharge lamp to introduce an energy from the power storage circuit to the flash light discharge lamp; and a controller controlling the step-up charging circuit and the initiation circuit to make the flash light discharge lamp perform successive lighting of a plurality of times. The controller is configured to apply an actual irradiation mode where the power storage circuit is charged with a relatively high energy to perform lighting after a weak irradiation mode where the power storage circuit is charged with a relatively low energy to perform lighting, in the successive lighting.;COPYRIGHT: (C)2013,JPO&INPIT
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