METHOD OF MANUFACTURING THIN-FILM TRANSISTOR, THIN-FILM TRANSISTOR, DISPLAY DEVICE, SENSOR, AND X-RAY DIGITAL PHOTOGRAPHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a thin-film transistor and the like having a high field-effect mobility and performing normally-off driving while increasing selectivity of a substrate.;SOLUTION: When an oxygen partial pressure to the total pressure of an atmosphere in a deposition chamber in a deposition step of an active layer is defined as Po₂depo(%), and an oxygen partial pressure to the total pressure of an atmosphere in a heat treatment step is defined as Po₂anneal(%), the deposition step and the heat treatment step are performed so that the oxygen partial pressure Po₂anneal(%) in the heat treatment step satisfies a relation of -20/3Po₂depo+40/3≤Po₂anneal≤-800/43Po₂depo+5900/43.;COPYRIGHT: (C)2013,JPO&INPIT