SEMICONDUCTOR MANUFACTURING APPARATUS, CLUSTER TOOL, AND CONTROL METHOD OF SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To perform an operation check of a process ship and a loader module without linking the process ship to the loader module.;SOLUTION: A semiconductor manufacturing apparatus consisting of a plurality of units comprises unit control means that is provided for each of the units and controls the units and integrated control means for outputting an instruction for a predetermined operation to the unit control means. The unit control means uses this instruction to make the unit perform the predetermined operation. The unit is controllable based only on the corresponding unit control means.;COPYRIGHT: (C)2012,JPO&INPIT