METHOD AND APPARATUS FOR RETRIEVAL OF DEFECTIVE CLUSTERING, RECORDING MEDIUM WITH STORED DEFECTIVE- CLUSTERING-RETRIEVAL PROGRAM, OPTIMIZATION METHOD FOR RELIEF CIRCUIT, PROCESS CONTROL METHOD, CLEAN-ROOM CONTROL METHOD, MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE, METHOD AND APPARATUS FOR EXTRACTION OF PROBLEMATIC PROCESS AND PROBLEMATIC APPARATUS, RECORDING MEDIUM WITH STORED EXTRACTION PROGRAM FOR THE PROBLEMATIC PROCESS AND THE PROBLEMATIC APPARATUS AND SCRAP DETERMINING METHOD FOR RETRIEVAL PARENT BODY

摘要

PROBLEM TO BE SOLVED: To provide a defective-clustering retrieval method, in which defective clustering can be retrieved quantitatively.;SOLUTION: The defective-clustering retrieval method is provided with a first step (S100), in which data regarding an imperfect entity existing inside a retrieval parent body is input; a second step (S200), in which the frequency distribution of the imperfect entity per unit cell obtained by dividing the retrieval parent body is calculated; a third step (S300) in which two or more kinds of discrete distribution functions are overlapped and approximated with reference to the frequency distribution, and a fourth step (S400) in which the clustering is retrieved, on the basis of the weight of the discrete distribution functions with reference to the frequency distribution. On the basis of the weight of the discrete distribution functions approximated to the imperfect entity generated to cluster inside the retrieval parent body due to a specific cause, the clustering or the like can be retrieved.;COPYRIGHT: (C)2002,JPO