首页> 外国专利> Bad clustering search method, bad clustering search apparatus, recording medium which stores a bad clustering search program, relief circuit optimization method, process management method, clean room management method, a method of manufacturing a semiconductor device, method for extracting problem process and issue equipment, problem process and a recording medium storing a program for extracting problem devices, problem process and apparatus for extracting problem devices, and search maternal scrap determination method of

Bad clustering search method, bad clustering search apparatus, recording medium which stores a bad clustering search program, relief circuit optimization method, process management method, clean room management method, a method of manufacturing a semiconductor device, method for extracting problem process and issue equipment, problem process and a recording medium storing a program for extracting problem devices, problem process and apparatus for extracting problem devices, and search maternal scrap determination method of

机译:不良聚类搜索方法,不良聚类搜索设备,存储不良聚类搜索程序的记录介质,缓解电路优化方法,过程管理方法,洁净室管理方法,半导体器件的制造方法,问题处理的提取方法和发行设备,问题处理和记录介质,其存储用于提取问题设备的程序,问题处理和设备用于提取问题设备,以及搜索母体废料的方法

摘要

PROBLEM TO BE SOLVED: To provide a defective-clustering retrieval method, in which defective clustering can be retrieved quantitatively.;SOLUTION: The defective-clustering retrieval method is provided with a first step (S100), in which data regarding an imperfect entity existing inside a retrieval parent body is input; a second step (S200), in which the frequency distribution of the imperfect entity per unit cell obtained by dividing the retrieval parent body is calculated; a third step (S300) in which two or more kinds of discrete distribution functions are overlapped and approximated with reference to the frequency distribution, and a fourth step (S400) in which the clustering is retrieved, on the basis of the weight of the discrete distribution functions with reference to the frequency distribution. On the basis of the weight of the discrete distribution functions approximated to the imperfect entity generated to cluster inside the retrieval parent body due to a specific cause, the clustering or the like can be retrieved.;COPYRIGHT: (C)2002,JPO
机译:解决的问题:提供一种缺陷聚类检索方法,其中可以定量地检索缺陷聚类。解决方案:缺陷聚类检索方法具有第一步(S100),其中存在有关不完美实体的数据在检索父体内输入;第二步骤(S200),计算通过划分检索母体获得的每单位单元的不完美实体的频率分布;第三步骤(S300),其中两种或更多种离散分布函数根据频率分布重叠并近似,第四步骤(S400),其中基于离散量的权重检索聚类分配功能参考频率分布。基于离散分布函数的权重,该权重近似于由于特定原因而在检索母体内部生成的不完美实体的聚类,因此可以检索聚类等.COPYRIGHT:(C)2002,JPO

著录项

  • 公开/公告号JP4250347B2

    专利类型

  • 公开/公告日2009-04-08

    原文格式PDF

  • 申请/专利权人 株式会社東芝;

    申请/专利号JP20010065338

  • 发明设计人 牛久 幸広;光武 邦寛;

    申请日2001-03-08

  • 分类号H01L21/02;G06F17/18;G06F17/30;

  • 国家 JP

  • 入库时间 2022-08-21 19:37:42

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