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Bad clustering search method, bad clustering search apparatus, recording medium which stores a bad clustering search program, relief circuit optimization method, process management method, clean room management method, a method of manufacturing a semiconductor device, method for extracting problem process and issue equipment, problem process and a recording medium storing a program for extracting problem devices, problem process and apparatus for extracting problem devices, and search maternal scrap determination method of
Bad clustering search method, bad clustering search apparatus, recording medium which stores a bad clustering search program, relief circuit optimization method, process management method, clean room management method, a method of manufacturing a semiconductor device, method for extracting problem process and issue equipment, problem process and a recording medium storing a program for extracting problem devices, problem process and apparatus for extracting problem devices, and search maternal scrap determination method of
PROBLEM TO BE SOLVED: To provide a defective-clustering retrieval method, in which defective clustering can be retrieved quantitatively.;SOLUTION: The defective-clustering retrieval method is provided with a first step (S100), in which data regarding an imperfect entity existing inside a retrieval parent body is input; a second step (S200), in which the frequency distribution of the imperfect entity per unit cell obtained by dividing the retrieval parent body is calculated; a third step (S300) in which two or more kinds of discrete distribution functions are overlapped and approximated with reference to the frequency distribution, and a fourth step (S400) in which the clustering is retrieved, on the basis of the weight of the discrete distribution functions with reference to the frequency distribution. On the basis of the weight of the discrete distribution functions approximated to the imperfect entity generated to cluster inside the retrieval parent body due to a specific cause, the clustering or the like can be retrieved.;COPYRIGHT: (C)2002,JPO
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