Dielectrophoretic cell chromatography device with concentric electrodes and spiral microfluidic channels were fabricated using MEMS technology

摘要

Dielectrophoretic micro cell chromatography device with a spiral microfluidic channels and concentric electrode was prepared according to the present invention, in accordance with MEMS technology, is composed of four groups of the central gap field effect electrode, entrance electrode, and the spiral region, there. Also, as main components, (2), the upper entrance electrode inner sub electrode (1), three-dimensional shape of the outer upper electrode secondary entrances electrode spiral center gap region (3), (4), (5), ( 6), read a certain point, and I have a (7) Insulation wafer.