Dielectrophoretic cell chromatography device with spiral microfluidic channels and concentric electrodes, fabricated with MEMS technology

摘要

This dielectrophoretic micro cell chromatography device with concentric electrodes and spiral microfluidic channels, produced according to MEMS technology subject to this invention; is composed of 4 groups of effect electrodes, inlet electrodes, spiral zone and central span, having exterior upper electrode (1), interior sub electrode with 3D geometry (2), upper inlet electrode (3), sub inlet electrode (4), spiral zone (5), central span (6), constant reading point and Insulating wafer (7) as the main components.