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LAYOUT VERIFICATION DEVICE OF SEMICONDUCTOR INTEGRATED CIRCUIT AND LAYOUT VERIFICATION METHOD

机译:半导体集成电路的布局验证装置及布局验证方法

摘要

PROBLEM TO BE SOLVED: To automatically check ion implantation in the design phase.SOLUTION: A layout verification device relating to an embodiment comprises: a first verification part 60 for verifying whether or not an element extracted from a layout of semiconductor integrated circuit is as described in a circuit diagram; and a second verification part 70 for verifying whether or not the layout of semiconductor integrated circuit complies with design rules extracted from specification information. A filter processing part included in one of the first and second verification parts 60 and 70 executes an AND logic among a verified element, mask data necessary to form the verified element and reverse data of mask data unnecessary to form the verified element, and determines whether or not ion implantation is executed appropriately to the verified element.
机译:解决的问题:在设计阶段自动检查离子注入。解决方案:与实施例有关的布局验证装置包括:第一验证部分60,用于验证从半导体集成电路的布局中提取的元素是否如所述。在电路图中第二验证部分70,用于验证半导体集成电路的布局是否符合从规格信息中提取的设计规则。第一验证部分60和第二验证部分70中的一个中包括的滤波器处理部分在验证元素,形成验证元素所必需的掩模数据和形成验证元素所不需要的掩模数据之间执行“与”逻辑,并确定是否是否对验证元素适当执行了离子注入。

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