ADJUSTMENT SYSTEM FOR LASER LIGHT SOURCE AND ADJUSTMENT METHOD FOR LASER LIGHT SOURCE

摘要

PROBLEM TO BE SOLVED: To provide an adjustment system for a laser light source which can adjust light emitted from a resonator accurately and appropriately.;SOLUTION: An adjustment system 10 for a laser light source 1 includes control means 13 for adjustment that includes a temperature adjustment unit 131 and a resonator adjustment unit 132. Under a state where an etalon 35 is dismounted from a resonator 3, the temperature adjustment unit 131 adjusts a temperature parameter of a KTP crystal 34 so that a peak wavelength of a spectrum detected by a light spectrum analyzer 121 and a wavelength of a saturated absorption line of iodine detected based on a signal outputted from an intensity detection unit 55 coincide with each other. Under a state where the etalon 35 is mounted to the resonator 3, the resonator adjustment unit 132 adjusts each of a temperature parameter of the etalon 35 and a resonator length parameter of the resonator 3 so that a wavelength detected by a light wavelength meter 122 and the wavelength of the iodine saturated absorption line coincide with each other.;COPYRIGHT: (C)2012,JPO&INPIT