Method for producing a parallel movement mechanism and parallel movement mechanism

摘要

The support portion is formed in the same manner, the moving part of the first layer is laminated on the upper surface of the intermediate layer was formed the second layer is laminated on the lower surface of the first formed in the first layer By in conjunction with the second beam that is formed with the beam, in the second layer, the moving portion is configured to translate allows the first layer in the stacking direction of the second layer and intermediate layer, the optical it is possible to suppress the positional deviation and inclination of the parts, translation with high accuracy small amounts are possible, it is possible to provide a manufacturing method of the parallel movement mechanism and the translating mechanism can obtain a large displacement by a small driving force.