MECHANISM FOR GUIDING PARALLEL MOVEMENT OF TWO SHAFTS AND TURNING OF ONE SHAFT, AND TABLE DEVICE PROVIDED WITH TWO PARALLEL SHAFTS AND ONE TURNING SHAFT USING THIS MECHANISM

摘要

PROBLEM TO BE SOLVED: To facilitate the indexing of a displacement part in each axial direction corresponding to the turning movement by providing a parallel movement guiding part for supporting one member in the same posture with the other member in directions crossing each other and freely to be moved in parallel with each other. ;SOLUTION: Linear driving mechanism 37A, 37B, 37D drive a moving block 4B of mechanism 1A, 1B, 1D for guiding parallel movement of two shafts and turning movement of one shaft, and one end of each driving mechanism is fixed to a base 34. The other end thereof is linked with the moving blocks 4B, 4D of the mechanism 1A, 1B, 1D for guiding parallel movement of two shafts and turning movement of one shaft for operation. With this structure, since the moving block 4B is driven in relation to the base 34, the linear driving mechanism 37A, 37B, 37D are driven in the X-axial direction or the Y-axial direction along first track rails 2A, 2B, 2D fixed to the base 34.;COPYRIGHT: (C)1999,JPO