Particle detection auxiliary method, particle detection method, particle detection auxiliary equipment and particle detection system

摘要

PROBLEM TO BE SOLVED: To provide a particle detection assisting method and a particle detection method capable of accurately detecting a fine organic particle and a fine inorganic particle of which detection has not been possible by a conventional light scattering method.;SOLUTION: The particle detection assisting method comprises: an adsorption/permeation process for adsorbing and permeating an organic gas constituent to an organic particle by bringing the organic gas into contact with the organic particle in a semiconductor manufacturing process; a foaming process for foaming and expanding the organic particle by bringing heated gas into contact with the organic particle brought into contact with the organic gas; an organic particle detection process for detecting the organic particle by applying light to the foamed and expanded organic particle and receiving scattered light from the organic particle; an oxidation process for decomposing the organic particle by oxidizing the inorganic particle and the organic particle and expanding the inorganic particle; and an inorganic particle detection process for detecting the inorganic particle by applying light to the expanded inorganic particle and receiving scattered light from the inorganic particle.;COPYRIGHT: (C)2009,JPO&INPIT