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Ag base alloy thin film and sputtering target for forming Ag base alloy thin film
Ag base alloy thin film and sputtering target for forming Ag base alloy thin film
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机译:Ag基合金薄膜和用于形成Ag基合金薄膜的溅射靶
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摘要
The present invention relates to an Ag alloy film. Particularly, it is preferably used as a reflective film or semi-transmissive reflective film for an optical information recording medium having high thermal conductivity/high reflectance/high durability in the field of optical information recording media, an electromagnetic-shielding film excellent in Ag aggregation resistance, and an optical reflective film on the back of a reflection type liquid crystal display device, or the like. The Ag alloy film of the present invention comprises an Ag base alloy containing Bi and/or Sb in a total amount of 0.005 to 10% (in terms of at %). Further, the present invention relates to a sputtering target used for the deposition of such an Ag alloy film.
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