Optical and electrical properties of pure Ag and Ag-based alloy thin films prepared by RF magnetron sputtering

摘要

Ag and Ag-(0.9 wt%)Pd-(1.0 wt%)Cu (APC) alloy films were deposited on glass substrates by RF magnetron sputtering. The reflectance of Ag films deposited at room temperature was 98% at a wavelength of 600 nm. However, it decreased with increasing substrate temperature due to crystal grain growth and film surface roughening. The resistivity of pure Ag films with thickness of 100 nm was about 2 muOmega cm, which is almost equivalent to that of bulk Ag (1.6 muOmega cm), while 95% of reflectance and 3 muOmega cm of resistivity were obtained in the case of APC film. (C) 2002 Elsevier Science Ltd. All rights reserved. [References: 4]