Magnestostrictive torque sensor and manufacturing method thereof, and electric power steering system

摘要

A magnestostrictive torque sensor detects rotating torque applied to a rod-shaped rotating shaft to work around the rotating shaft based on a change in magnetic characteristics of a magnetostrictive film formed on a surface the rotating shaft so as to extend around a full circumference thereof in a circumferential direction. The magnetostrictive film is formed continuously in an axial direction at a portion on the rotating shaft in the axial direction thereof. The magnetostrictive film has on the continuously formed area a first magnetostrictive film portion and a second magnetostrictive film portion having magnetic anisotropies which are opposite to each other and a third magnetostrictive film portion which is formed between the first and second magnetostrictive film portions. A first detection coil, a second detection coil and a third detection coil are provided for the first magnetostrictive film portion, the second magnetostrictive film portion and the third magnetostrictive film portion, respectively.