METHOD FOR FABRICATION OF THREE-DIMENSIONAL PLASMONIC NANOFUNNEL ARRAYS BY MEANS OF DIRECTIONAL PHOTOFLUIDIZATION OF AZOBENZENE POLYMER AND THEIR APPLICATIONS

摘要

PURPOSE: A manufacturing method and application of 3D plasmonic nano-funnel structure using directional photo fluidization phenomenon of azobenzene polymer is provided to precisely control shape and size of the plasmonic nano-tip structure by using a directional photo fluidization phenomenon. CONSTITUTION: A manufacturing method and application of 3D plasmonic nano-funnel structure using directional photo fluidization phenomenon of azobenzene polymer comprises next steps: transforming circular hole azobenzene polymer array to a funnel shaped azobenzene polymer array by using a directionality photo fluidization phenomenon; obtaining rubber mold by solidifying at 60-80 deg. Celsius after injecting precursor of polydimethylsiloxane(PDMS) which is includes polymer and mixture of hardener into a template; obtaining urethane based precursor film by sin coating the precursor on a glass; eliminating the rubber mold by imprinting the rubber mold on a precursor film(4) and solidifying the precursor film by irradiating ultraviolet ray.