机译:Sub-10 nm fabrication:methods and applications
National Engineering Research Center for High Efficiency Grinding State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body College of Mechanical and Vehicle Engineering Hunan University Changsha 410082 People’s Republic of China;
National Engineering Research Center for High Efficiency Grinding State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body College of Mechanical and Vehicle Engineering Hunan University Changsha 410082 People’s Republic of China;
National Engineering Research Center for High Efficiency Grinding State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body College of Mechanical and Vehicle Engineering Hunan University Changsha 410082 People’s Republic of China;
National Engineering Research Center for High Efficiency Grinding State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body College of Mechanical and Vehicle Engineering Hunan University Changsha 410082 People’s Republic of China;
National Engineering Research Center for High Efficiency Grinding State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body College of Mechanical and Vehicle Engineering Hunan University Changsha 410082 People’s Republic of China;
Advanced Design&Manufacturing Group for Micro/Nanophotonics Jihua Laboratory Foshan 528000 People’s Republic of China;
National Engineering Research Center for High Efficiency Grinding State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body College of Mechanical and Vehicle Engineering Hunan University Changsha 410082 People’s Republic of China;
extremely small manufacturing; sub-10 nm fabrication; nanolithography; nanomanufacturing; atomic-scale manufacturing;