Method for fabrication of three-dimensional plasmonic nanofunnel arrays by means of directional photofluidization of azobenzene polymer and their applications

摘要

The present invention comprises a first step of transforming a circular hole azobenzene polymer array into a "funnel-shaped azobenzene polymer array" using directional photofluidization; Using the funnel-shaped azobenzene polymer array as a template, a solution containing a precursor of a polymer containing polydimethylsiloxane (PDMS) and a curing agent was added thereto, and cured at 60 to 80 ° C., followed by inverting the funnel-shaped polymer array. (易) second step of obtaining a rubber mold having a copied shape; A third step of obtaining a urethane-based precursor film by spin coating a urethane-based precursor on a glass; Imprinting the rubber mold on the urethane-based precursor film, and then irradiating UV light to cure the urethane-based precursor film, and then removing the rubber mold; Method for producing 'funnel-shaped three-dimensional plasmonic nano-tip structure array' and the 'funnel-shaped three-dimensional plasmonic nano-tip structure array' produced by the method for surface amplification Raman scattering signal measurement It is about how to use.