APPARATUS FOR MANUFACTURING LARGE-SIZED THIN FILM-TYPE CIGS SOLAR CELL

摘要

PURPOSE: An apparatus for manufacturing a large area CIGS thin film is provided to mass produce a solar cell at high speed by selectively recharging consumed sources without breaking high vacuum of a deposition chamber. CONSTITUTION: A deposition chamber(10) includes a gate valve(15). A source chamber(20a-20j) is located on the deposition chamber. A crucible unit(200) which is an evaporation source and a lifting stage(40) are prepared in the source chamber. The crucible unit is composed of a crucible body and a gas jet unit. The gas jet unit is combined with the upper part of the crucible body.