首页> 外国专利> CIGS FORMING METHOD FOR THIN FILM USING CBD FORMING APPARATUS FOR THIN FILM AND MANUFACTURING METHOD FOR CIGS SOLAR CELL

CIGS FORMING METHOD FOR THIN FILM USING CBD FORMING APPARATUS FOR THIN FILM AND MANUFACTURING METHOD FOR CIGS SOLAR CELL

机译:利用CBD薄膜的薄膜形成装置的CIGS薄膜的形成方法和CIGS太阳能电池的制造方法

摘要

The present invention relates to a thin film forming apparatus which has a simple configuration and can accurately check the thickness of a thin film solution-grown by using relatively inexpensive equipment. The thin film forming apparatus comprises: a reactor filled with a solution containing a raw material for forming a thin film; two probes having one ends immersed in the solution and spaced apart; and a meter connected to the probes to measure the resistance between the probes. A change in the resistance by the thin film formed on the surfaces of the probes immersed in the solution allows the thickness of the thin film formed on the surface of a substrate in the reactor to be measured in real time. The present invention solves a problem that it is difficult to control the thickness of the thin film, which is a disadvantage of chemical bath deposition, by adding simple and inexpensive equipment, thereby increasing the efficiency of the product even with a quick and inexpensive chemical bath deposition method and growing the thin film to an optimal thickness. Further, it is not only easy for the probes for thickness measurement to be reused in the equipment of the present invention, but also the equipment can be used for a long time, thereby lowering the costs of equipment manufacture and management.
机译:薄膜形成装置技术领域本发明涉及一种薄膜形成装置,该薄膜形成装置具有简单的结构,并且可以通过使用相对便宜的设备来准确地检查生长的薄膜溶液的厚度。该薄膜形成设备包括:反应器,其填充有包含用于形成薄膜的原料的溶液。两个探针,其一端浸入溶液中并隔开。仪表连接到探针以测量探针之间的电阻。通过在浸入溶液中的探针的表面上形成的薄膜的电阻的变化,可以实时地测量在反应器中的基板的表面上形成的薄膜的厚度。本发明通过添加简单且廉价的设备来解决难以控制薄膜厚度的问题,这是化学浴沉积的缺点,从而即使在快速且廉价的化学浴中也提高了产品的效率。沉积方法并将薄膜生长到最佳厚度。此外,厚度测量用的探头不仅容易在本发明的设备中重复使用,而且该设备可以长时间使用,从而降低了设备制造和管理的成本。

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