HIGH SPEED SCANNING PROBE MICROSCOPY USING EDDY CURRENT MEASUREMENT

摘要

PURPOSE: A high-speed scanning probe microscope using eddy current measurement is provided to ensure high resolution in high-speed scanning and improve the measurement reliability. CONSTITUTION: A high-speed scanning probe microscope using eddy current measurement comprises a magnetic field generator(200) and a cantilever detector(110). The magnetic field generator is fixed to the bottom of a sample holding part(120). The cantilever detector, coated with metal, comprises a cantilever support and a cantilever which is formed with a coil located above a sample. The high-speed scanning probe microscope measures changes in magnetic field created by eddy current created according to the movement of the cantilever detector while maintaining uniform distance between the sample and the cantilever detector probe, and thereby high-speed scanning the sample.