首页> 外文会议>Conference on Testing, Reliability, and Application of Micro- and Nano-Material Systems II; 20040315-20040317; San Diego,CA; US >Barkhausen noise and eddy current microscopy - a new scanning probe technique for microscale characterization of materials
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Barkhausen noise and eddy current microscopy - a new scanning probe technique for microscale characterization of materials

机译:Barkhausen噪声和涡流显微镜-一种用于材料微观表征的新型扫描探针技术

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摘要

The need for an accelerated development of new materials and surfaces raises expectations in lateral homogeneity and quantitative exactness of the characteristic material properties. The interest is focused on microstructure characterization, detection of micro-imperfections and evaluation of the local distribution of residual stresses, mechanical hardness and coating thickness. These requirements meet with the development of high-resolution NDT methods such as Barkhausen Noise and Eddy Current Microscopy (BEMI) at IZFP. BEMI enables locally high-resolved non-destructive materials testing by means of Barkhausen noise and eddy current analysis: The sample is scanned with a miniaturized inductive probe which serves as Barkhausen noise pick-up and eddy current inductive sensor. Characteristic quantities are derived from the measured data and mapped as 2-D or 3-D images allowing the recognition of defects as small as 5 μm. The device is controlled by a modular measuring system which is split into modules for positioning, data acquisition and evaluation. Two additional software modules enable contact-less, quantitative testing of sensitive surfaces. This way, thin coatings can be characterized regarding their microstructure, thickness, internal stresses and heat-treatment condition. The efficiency of this device was demonstrated on many materials as solids stacks of several thin films. The BEMI testing device achieves an accuracy of 10 nm for the thickness of thin films on a variety of substrates.
机译:加速开发新材料和表面的需求提高了人们对材料特性的横向均匀性和定量精确性的期望。人们的兴趣集中在微观结构表征,微观缺陷的检测以及残余应力,机械硬度和涂层厚度的局部分布评估上。这些要求可以满足高分辨率无损检测方法的发展,例如IZFP的Barkhausen噪声和涡流显微镜(BEMI)。 BEMI可以通过Barkhausen噪声和涡流分析实现本地高分辨率的非破坏性材料测试:用微型感应探头扫描样品,该探头用作Barkhausen拾音和涡流感应传感器。从测量数据中得出特征量,并将其映射为2D或3D图像,从而可以识别小至5μm的缺陷。该设备由模块化测量系统控制,该系统分为用于定位,数据采集和评估的模块。另外两个软件模块可实现对敏感表面的非接触式定量测试。这样,薄涂层就其微观结构,厚度,内应力和热处理条件而言可以被表征。该设备的效率在许多材料上都得到了证明,即多个薄膜的固体堆叠。对于各种基板上的薄膜厚度,BEMI测试设备可实现10 nm的精度。

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