首页> 外国专利> AN APPARATUS AND METHOD FOR PROVIDING ALIGNMENT OF A PROBE, AND A TESTING APPARATUS FOR TESTING ELECTRIC PROPERTIES ON A SPECIFIC LOCATION OF A TEST SAMPLE

AN APPARATUS AND METHOD FOR PROVIDING ALIGNMENT OF A PROBE, AND A TESTING APPARATUS FOR TESTING ELECTRIC PROPERTIES ON A SPECIFIC LOCATION OF A TEST SAMPLE

机译:提供探针对准的设备和方法,以及在特定样品位置上测试电性能的测试设备

摘要

A probe for testing electric properties on a specific location of a test sample, comprises a supporting body defining opposite first and second parts constituting a flexible cantilever part being flexible in one direction and a base part, respectively. The cantilever part defines an outer planar surface substantially perpendicular to the one direction, the base part being adapted for being fixated in a co-operating testing machine The probe further comprises at least one conductive probe arm in the cantilever part being positioned opposite the base part. The cantilever part defines opposite first and second regions, the second region being in contact with the base part, the first region defining first and second side surfaces, each of the first and second side surfaces defining a first angle with the outer planar surface, a first width defined between the first and the second side surfaces, the second region defining third and fourth side surfaces, each of the third and fourth side surfaces defining a second angle with the outer planar surface, a second width defined between the third and the fourth side surfaces, and the second width being equal to and/or smaller than the first width.
机译:一种用于在测试样品的特定位置上测试电特性的探针,包括:支撑体,其限定了相对的第一和第二部分,所述第一和第二部分分别构成在一个方向上是柔性的柔性悬臂部分和基础部分。悬臂部分限定基本垂直于所述一个方向的外平面,所述基部适于固定在协作测试机中。所述探针还包括至少一个导电探针臂,所述悬臂部中的至少一个导电探针臂与所述基部相对设置。悬臂部分限定相对的第一和第二区域,第二区域与基部接触,第一区域限定第一和第二侧表面,第一和第二侧表面中的每一个与外平坦表面限定第一角度,在第一侧表面和第二侧表面之间限定第一宽度,第二区域限定第三侧表面和第四侧表面,第三侧表面和第四侧表面中的每一个限定与外部平面的第二角度,第二宽度限定在第三侧表面和第四侧表面之间侧面,并且第二宽度等于和/或小于第一宽度。

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