PROCESS MONITORING DEVICE FOR SEMICONDUCTOR MANUFACTURING APPARATUS, PROCESS MONITORING METHOD FOR SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a process monitoring device of a semiconductor manufacturing apparatus and a process monitoring method of the semiconductor manufacturing apparatus, which can monitor the process of the semiconductor manufacturing apparatus more readily and reliably than before, and the semiconductor manufacturing apparatus.SOLUTION: A monitoring device of a semiconductor manufacturing apparatus that monitors the state of a process of the semiconductor manufacturing apparatus that processes a substrate to be processed includes: storage means that stores normal-time moving image data indicating a normal state of the process; imaging means that captures an image of the state of the process to be monitored so as to obtain moving image data; abnormality degree calculation means that extracts a feature quantity for each frame of the moving image data obtained by the imaging means and the normal-time moving image data, and calculates an abnormal degree on the basis of the extracted feature quantity; and display means that displays the abnormal degree calculated by the abnormality degree calculation means in association with the frame position of the moving image data.