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Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatus
Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatus
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机译:半导体制造装置中的工序监视装置及工序监视方法以及半导体制造装置
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摘要
Provide is a process monitoring device in a semiconductor manufacturing apparatus that can readily and reliably monitor the process in the semiconductor manufacturing apparatus. The process monitoring device includes a storage unit that stores a normal state moving image data indicating a normal state of the process; an image capturing unit that captures an image of a state of the process to be monitored to acquire a moving image data; an abnormality level calculation unit configured to extract a feature amount for each frame of the moving image data and the normal state moving image data, and calculate an abnormality level based on the extracted feature amount; and a display unit that displays the abnormality level calculated by the abnormality level calculation unit in association with a frame position of the moving image data.
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