HIGH PURITY ZrB2 POWDER

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a high purity ZrB₂ powder which achieves a purity of 99.9 wt.% or higher of a ZrB₂ powder for use in sintering, the purity being required for manufacturing a ZrB₂ single crystal substrate by a high-frequency induction heating FZ method and thereby enabling the ZrB₂ single crystal substrate to be enlarged and also enabling the production cost associated with the enlargement to be reduced.;SOLUTION: A method for producing a high purity ZrB₂ powder comprises: a step of subjecting a raw material of a Zr sponge to electron beam melting and casting to produce an ingot having a purity of 99.9 wt.% or higher; a step of cutting the ingot into cut powder and then hydrogenating the cut powder into ZrH₂; a step of pulverizing the product, dehydrogenating into Zr powder and oxidizing the Zr powder at high temperature in an oxygen atmosphere into fine powder of ZrO₂; and a step of admixing the fine powder of ZrO₂ with B having a purity of 99.9 wt.% or higher to reduce ZrO₂ and obtain ZrB₂ powder having a purity of 99.9 wt.% or higher.;COPYRIGHT: (C)2014,JPO&INPIT