MECHANISM FOR CONTROLLING DEGREE OF VACUUM OF VACUUM CHAMBER, JOINING APPARATUS EQUIPPED WITH THE SAME, METHOD FOR CONTROLLING DEGREE OF VACUUM OF VACUUM CHAMBER, AND METHOD FOR CONTROLLING DEGREE OF VACUUM OF JOINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a mechanism for controlling the degree of vacuum of a vacuum chamber capable of enhancing the accuracy of controlling a vacuum pressure with a simple constitution, a joining apparatus equipped with the same, a method for controlling the degree of vacuum of the vacuum chamber, and a method for controlling the degree of vacuum of the joining apparatus.;SOLUTION: The mechanism for controlling the degree of vacuum of the vacuum chamber for controlling the vacuum pressure value of the vacuum chamber D includes: a vacuum passage for exhausting the vacuum chamber D; a flow rate adjusting valve 30 for introducing gas into the vacuum chamber D; and a controlling part 32 for controlling the opening ratio of the flow rate adjusting valve 30. The controlling part 32 controls the opening ratio of the flow rate adjusting valve 30 based on the vacuum pressure value of the vacuum chamber D, and adjusts the vacuum pressure value of the vacuum chamber D to a target vacuum pressure value.;COPYRIGHT: (C)2013,JPO&INPIT