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Method of manufacturing at least one deformable membrane micropump and deformable membrane micropump
Method of manufacturing at least one deformable membrane micropump and deformable membrane micropump
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机译:至少一种可变形膜微泵的制造方法和可变形膜微泵
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摘要
A method for producing at least one deformable membrane micropump including a first substrate and a second substrate assembled together, the first substrate including at least one cavity and the second substrate including at least one deformable membrane arranged facing the cavity. In the method: the cavity is produced in the first substrate; then the first and second substrates are assembled together; then the deformable membrane is produced in the second substrate.
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