PROCESS FOR MANUFACTURING AT LEAST ONE DEFORMABLE MEMBRANE MICROPUMP AND DEFORMABLE MEMBRANE MICROPUMP

摘要

The invention relates to a method for manufacturing at least one deformable membrane micropump comprising a first substrate (10) and a second substrate (20) assembled to each other, the first substrate (10) comprising at least a cavity (12-2) and the second substrate (20) having at least one deformable membrane (22-2) disposed facing said cavity (12-2). Said method comprises the following steps: - said cavity (12-2) is made in the first substrate (10), then the first (10) and second (20) substrates are assembled to each other, then - said deformable membrane (22-2) is made in the second substrate (20).