Scanning device, a two-dimensional scanning device and two-dimensional optical scanning device

摘要

PPROBLEM TO BE SOLVED: To provide a scanner for accurately preventing phase deviation and amplitude change from occurring due to environmental change, secular change or the like at a low cost. PSOLUTION: Changes of electrostatic capacities around each shaft of a movable part of a two-dimensional scanner 10 having a two-dimensional scannable movable part around an X axis and a Y axis are converted into voltage signals with a CV conversion part 30, and synchronized and detected with reference signals generated with a reference signal generation part 40. After regulating phases of drive signals with a phase regulation part 60, the phase of the reference signal is shifted up to 90 degrees. On the basis of the reference signal, the amplitude of the drive signals after regulating the phase is regulated with an amplitude regulation part 70 like the phase to drive the two-dimensional scanner 10. The reference signal synchronized with display timing generated with a timing creation part 110 is generated, and a light beam is radiated on the two-dimensional scanner 10 from a light beam radiation device 100 through a light beam drive part 120 to form display images. PCOPYRIGHT: (C)2010,JPO&INPIT