Vibration device, a two-dimensional vibration device, an optical scanning device and a two-dimensional optical scanning device

摘要

PROBLEM TO BE SOLVED: To provide a two-dimensional scanner which accurately detects a vibration angle of a vibrator by a simple structure to perform scanning.SOLUTION: A first region 108 is formed on an SOI (Silicon On Insulator) wafer to constitute a two-dimensional optical scanning part 100 wherein a torsional vibration system with three degrees of freedom is excited by comb teeth to cause resonance. A 20th vibration detector 32 is coupled with the SOI wafer by a 20th elastically deformable member 36 so as to vibrate rotationally around a 20th center axis, on a second region 31 formed in the vicinity of the first region 108 and has a natural frequency equal to a frequency of a mirror portion 104 during its rotational vibration around a main scanning axis, and a 20th angle detection part 30 which is installed separately in the 20th vibration detector 32 and the second region 31 and detects a rotational angle around the 20th center axis during rotational vibration of the 20th vibration detector 32 with a 20th natural frequency are disposed, to detect an angle around the main scanning axis of the mirror part 104. A 30th angle detection part 40 is disposed in the vicinity of the first region 108 in the same manner to detect an angle around a sub-scanning axis of the mirror part 104.