A method of manufacturing the same and InSb thin film magnetic sensor using the same and thin film laminate

摘要

The present invention relates to an InSb thin film magnetic sensor and thin film stack flux density can be detected directly with high sensitivity, are used in a micro InSb thin film magnetic sensor with low current consumption and power consumption. The magnetic sensor unit, or an InSb thin film magnetic sensor has a magnetic field detector and InSb thin film. InSb operation layer is InSb thin film formed on a substrate (1) and (3) shows the p-type conductivity or insulating or high resistance (3) The InSb active layer, InSb larger layer bandgap I have provided _1-x-y Sb mixed crystal layer _Al x _Ga y _In is (0 ≦ x, y ≦ 1) and (2). Mixed crystal layer (2), is provided between the substrate and (1) InSb operation layer (3), the range of 17% from 5.0% content of atoms of Ga and Al (x + y) is (0. is 05 ≦ x + y ≦ 0.17).