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Miniaturization of High-Frequency Carrier-Type Thin-Film Magnetic Field Sensor Using Laminated Film

机译:使用层压膜的高频载波型薄膜磁场传感器的小型化

摘要

We examined a laminated high-frequency carrier-type thin-film magnetic field sensor that consists of CoNbZr soft magnetic films with Nb nonmagnetic conductive interlayer. The lamination can change domain structure of the sensor and obtain high sensitivity. An impedance change of 6 /spl Omega/ and a gain of 43 k/spl Omega//T was achieved when the length of the laminated sensor was 1 mm. The gain is four times larger than that of a monolayer sensor.
机译:我们检查了一种层压的高频载流子型薄膜磁场传感器,该传感器由具有Nb非磁性导电夹层的CoNbZr软磁性膜组成。叠层可以改变传感器的畴结构并获得高灵敏度。当层压传感器的长度为1mm时,阻抗变化为6 / spl Omega /,增益为43k / spl Omega // T。增益是单层传感器的四倍。

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