Device comprising reflected light intensity measurement for the laminated structure, the reflected light measurement for the laminated structure, and viscosity measurement method and / or mass and / or the thickness of the thin film

摘要

Providing a reflected light intensity measurement laminated structure can be simplified by an optical method to measure more sensitive surface adsorption layer thickness and the like. Reflected light intensity measurement for the laminated structure at a wavelength of at least one comprising a valve metal light interference layer of metal such as titanium. Furthermore, in the reflected light intensity measurement for the laminated structure, and / or the thickness of the measured film by irradiating light to the measurement target film and measuring the change in the reflected light intensity at a wavelength of at least one measurement medium mass measurement method or the thickness of the thin film to measure the viscosity and / or mass.